Epitaxial growth of transition metal nitrides by reactive sputtering

Epitaxial growth of transition metal nitrides by reactive sputtering

Implementing transition metal nitride (TM-nitride) layers by epitaxy into group-III nitride semiconductor layer structures may solve substantial persisting problems for electronic and optoelectronic device configurations and subsequently enable new device classes in the favorable nitride semiconduct...

Full description

Saved in:

Bibliographic Details
Main Authors:	Florian Hörich, Christopher Lüttich, Jona Grümbel, Jürgen Bläsing, Martin Feneberg, Armin Dadgar, Rüdiger Goldhahn, André Strittmatter
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2025-01-01
Series:	Frontiers in Materials
Subjects:	sputter epitaxy transition metal nitrides group III-nitrides x-ray diffraction vertical GaN on Si electronics
Online Access:	https://www.frontiersin.org/articles/10.3389/fmats.2025.1507123/full
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

A review of GaN RF devices and power amplifiers for 5G communication applications
by: Hao Lu, et al.
Published: (2025-01-01)

Complex Nanostructures by Pulsed Droplet Epitaxy
by: Noboyuki Koguchi, et al.
Published: (2011-06-01)

GaN Nanopowder synthesis via nitridation: Fabrication and characterization of GaN thin Films for UV detection applications
by: Mahdi Hajimazdarani, et al.
Published: (2025-01-01)

Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
by: Jialun Li, et al.
Published: (2024-01-01)

Progress in Boron Nitride-Based Materials as Catalysts for Energy Storage and Electrochemical Application
by: Khursheed Ahmad, et al.
Published: (2024-12-01)

Room Temperature Gas Sensor Based on GaN/PANI Micro Composite with Ultrahigh NH3 Gas Sensibility
by: LIU Xiaoru, et al.
Published: (2025-01-01)

Functionalized Aluminum Nitride for Improving Hydrolysis Resistances of Highly Thermally Conductive Polysiloxane Composites
by: Mukun He, et al.
Published: (2025-02-01)

Wafer-Scale Monolithic Integration of LEDs with p-GaN-Depletion MOSFETs on a GaN LED Epitaxial Layer
by: Boseong Son, et al.
Published: (2024-01-01)

Ultra‐Thin Strain‐Relieving Si1−xGex Layers Enabling III‐V Epitaxy on Si
by: Trevor R. Smith, et al.
Published: (2025-02-01)

Mosaic Structure of GaN Film Grown on Sapphire Substrate by AP-MOCVD: Impact of Thermal Annealing on the Tilt and Twist Angles
by: J. Laifi, et al.
Published: (2025-01-01)

Enhanced Laser Damage Threshold in Optically Addressable Light Valves via Aluminum Nitride Photoconductors
by: Soroush Ghandiparsi, et al.
Published: (2025-01-01)

Preparation of high quality ferrovanadium nitride by carbothermal reduction nitridation process
by: Wu Y.D., et al.
Published: (2017-01-01)

Advance Chemical Mechanical Polishing Technique for Gallium Nitride Substrate
by: Xuanyi Zhao, et al.
Published: (2025-01-01)

Investigation of dissolution resistance of blank and gas-nitrided carbon steels in stationary SAC305 solder alloy melt
by: Benke M., et al.
Published: (2018-01-01)

Characterization of the expanded austenite developed on AISI 316 LM steel by plasma nitriding
by: Keddam M., et al.
Published: (2017-01-01)

Highly Tunable Moiré Superlattice Potentials in Twisted Hexagonal Boron Nitrides
by: Kwanghee Han, et al.
Published: (2025-01-01)

Properties of κ‐Ga2O3 Prepared by Epitaxial Lateral Overgrowth
by: Alexander Polyakov, et al.
Published: (2025-01-01)

TCAD analysis of the high-temperature reverse-bias stress on AlGaN/GaN HEMTs
by: Franco Ercolano, et al.
Published: (2025-03-01)

Surface plasmon resonance biosensors for SARS-CoV-2 sensing: The role of silicon nitride and graphene
by: Talia Tene, et al.
Published: (2025-05-01)

Photocatalytic Degradation of E.Coli Bacteria by Graphitic Carbon Nitride Photocatalysts under Visible Light Irradiation
by: Zahra Ahmadi Panah, et al.
Published: (2024-08-01)

Predictive modelling of hexagonal boron nitride nanosheets yield through machine and deep learning: An ultrasonic exfoliation parametric evaluation
by: Jerrin Joy Varughese, et al.
Published: (2025-03-01)

Experimental progress in freestanding oxide membranes designed by epitaxy
by: Varun Harbola, et al.
Published: (2025-12-01)

Study on the Tribological Behavior of Laser Surface Texturing on Silicon Nitride Ceramic Under Water Lubrication
by: Hong-Jian Wang, et al.
Published: (2025-01-01)

Comparative immobilization of lead, cadmium, and copper in soil using dead bacterial biomass and graphitic carbon nitride nanomaterials
by: Asifa Farooqi, et al.
Published: (2025-05-01)

Microstructures and Mechanical Properties of Al Matrix Composites Reinforced with TiO<sub>2</sub> and Graphitic Carbon Nitride
by: Chen Wang, et al.
Published: (2025-01-01)

Enhancing Carriers’ Confinement by Introducing BAlGaN Quantum Barriers for the Better Optoelectronic Performance of Deep UV LEDs
by: Jamshad Bashir, et al.
Published: (2025-01-01)

Binder-Free Hexagonal Boron Nitride Nanosheets (BNNSs) as Protective Coatings for Copper, Steel, and Wood: A Review
by: Muhammad Faheem Maqsood, et al.
Published: (2025-01-01)

The Effect of Channel Layer Thickness on the Performance of GaN HEMTs for RF Applications
by: Qian Yu, et al.
Published: (2024-12-01)

Thermodynamic modeling of the Hf-N system
by: Pang M., et al.
Published: (2018-01-01)

Enhancing thermoelectric properties of ScN films through twin domains
by: J. More-Chevalier, et al.
Published: (2025-01-01)

Preparation and Tribological Performance of the Ag/BN Nanocomposite as Additives for Lithium-Based Grease
by: Yijun Chen, et al.
Published: (2025-01-01)

Self-Assembly Strategy for Synthesis of WO<sub>3</sub>@TCN Heterojunction: Efficient for Photocatalytic Degradation and Hydrogen Production via Water Splitting
by: Li Zhou, et al.
Published: (2025-01-01)

Increasing the Wear Resistance of Stamping Tools for Coordinate Punching of Sheet Steel Using CrAlSiN and DLC:Si Coatings
by: Sergey N. Grigoriev, et al.
Published: (2025-01-01)

Broadband SiN Interleaver With a Ring Assisted MZI Using a Tapered MMI Coupler
by: Laaya Sabri, et al.
Published: (2024-01-01)

Enhanced Performance of High-Power InAs/GaAs Quantum Dot Lasers Through Indium Flushing
by: Deyan Dai, et al.
Published: (2025-01-01)

Silver (Ag) doped graphitic carbon nitride (g-C3N4)/biochar composite photocatalyst for improved photocatalytic degradation of ciprofloxacin (CIP)
by: Ijlal Idrees, et al.
Published: (2025-01-01)

Photoluminescence and Photocurrent from InGaN/GaN Diodes with Quantum Wells of Different Widths and Polarities
by: Artem Bercha, et al.
Published: (2025-01-01)

Highly Strained AlGaAs‐GaAsP Nanomembranes‐Based High‐Performance Diode
by: Haris Naeem Abbasi, et al.
Published: (2025-02-01)

Enantiospecific mirror-imaged growth in overlayers of enantiopure thiadiazole-[9]helicene on Au(111) without commensurability
by: Fumi Nishino, et al.
Published: (2025-01-01)

INVESTIGATION OF POLARIZATION IN HETEROSTRUCTURES WITH THE QUANTUM WELL AlGaN / GaN USING CAPACITANCE-VOLTAGE CHARACTERISTICS
by: O. A. Ruban, et al.
Published: (2016-10-01)