Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments
Mass spectrometry measurements at high temperatures on amorphous Ta2O5, produced by Ion Beam Sputtering (IBS) and widely used for the high reflective coatings of the mirrors of gravitational-wave detectors, detect a release of argon around 1000 K. This process is thermally activated and the correspo...
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| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-01-01
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| Series: | Heliyon |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844025003895 |
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