Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments

Argon release, crystallization, morphological and optical changes of ion-beam sputtered Ta2O5 thin films during thermal treatments

Mass spectrometry measurements at high temperatures on amorphous Ta2O5, produced by Ion Beam Sputtering (IBS) and widely used for the high reflective coatings of the mirrors of gravitational-wave detectors, detect a release of argon around 1000 K. This process is thermally activated and the correspo...

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Bibliographic Details
Main Authors: A. Paolone, M. Bazzan, G. Favaro, F. Borondics, G. Nemeth, F. Capitani, S. Swaraj, R. Belkhou, R. Flammini, J. Teillon, C. Michel, D. Hofman, M. Granata
Format: Article
Language:English
Published: Elsevier 2025-01-01
Series:Heliyon
Subjects:
Amorphous materials
Gravitational wave detectors
Tantala
Thermal treatments
Crystallization
Optical properties
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844025003895
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