Analysis of the Radial Force of a Piezoelectric Actuator with Interdigitated Spiral Electrodes
The actuator is a critical component of the micromanipulator. By utilizing the properties of expansion and contraction, the piezoelectric actuator enables the manipulator to handle and grasp miniature objects during micromanipulation. However, in piezoelectric ceramic disc actuators with conventiona...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/11/1378 |
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