Determination of contact resistivity of ohmic contacts to semiconductor plates by the method Cox-Strack
Modified variant of the method Cox-Strack, which allows to reduce an amount of frontal contacts on the test sample before 2 and simultaneously exclude an operation of the extrapolation of schedules at the determination of the specific contact resistance ρК, is considered. There is shown that con...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2018-09-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2018/4%20(160)/119-123%20%D0%91%D1%83%D1%80%D0%BB%D0%B0%D0%BA%D0%BE%D0%B2%20%D0%A0.%20%D0%91..pdf |
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| Summary: | Modified variant of the method Cox-Strack, which allows to
reduce an amount of frontal contacts on the test sample before 2
and simultaneously exclude an operation of the extrapolation of
schedules at the determination of the specific contact resistance
ρК, is considered. There is shown that contribution of the contact
resistance RK in the impedance RT of the test structure takes
greater values, when diameter of the frontal contact lies in the
interval 40–1040 micrometer, that promote more efficient process
of supervision resistivity of ohmic contacts to semiconductor
plates. |
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| ISSN: | 1813-8225 2541-7541 |