High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN Superlattice Structure

High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN Superlattice Structure

The highly conductance of Mg-doped Al0.3Ga0.7N layer using low-pressure metal organic chemical vapour deposition (MOCVD) on Al0.4Ga0.6N/AlN superlattice structure was reported. The rapid thermal annealing (RTA) has been employed for the effective activation and generation of holes, and a minimum p-t...

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Bibliographic Details
Main Authors: Zhiming Li, Jinping Li, Haiying Jiang, Yanbin Han, Yingjie Xia, Yimei Huang, Jianqin Yin, Shigang Hu
Format: Article
Language:English
Published: Wiley 2014-01-01
Series:Advances in Condensed Matter Physics
Online Access:http://dx.doi.org/10.1155/2014/784918
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