Full-System Simulation and Analysis of a Four-Mass Vibratory MEMS Gyroscope
This study presents a full-system simulation methodology for MEMS, addressing the critical need for reliable performance prediction in microsystem design. While existing digital tools have been widely adopted in related fields, current approaches often remain fragmented and focused on specific aspec...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/4/414 |
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