Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
Abstract Terahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability. For easy integration with CMOS circuits, silicon (Si) based MEMS detectors are highly desirable. Here we report an uncoo...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-07-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00996-2 |
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