A Novel Approach of −80 °C Cascade Refrigeration System Using Non-Flammable Quaternary Refrigerants for Semiconductor Process Applications
Ultra-low temperature chillers have seen increasing demand with the advancement of semiconductor technology. Mixed refrigerant (MR) cascade refrigeration systems (CRSs) are widely utilized for their stability and high cooling performance at low temperatures. Extensive research has been conducted on...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-12-01
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| Series: | Energies |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1073/17/23/6178 |
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