Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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American Chemical Society
2025-04-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.4c11244 |
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| _version_ | 1850273584224665600 |
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| author | Yafeng Wang Lipei Peng Yongdi Zhao Jianpeng Wu Haisheng Fang Hao Chen Tuo Wang |
| author_facet | Yafeng Wang Lipei Peng Yongdi Zhao Jianpeng Wu Haisheng Fang Hao Chen Tuo Wang |
| author_sort | Yafeng Wang |
| collection | DOAJ |
| format | Article |
| id | doaj-art-f98bbbd6567e47eeaccd1ac96d27d73d |
| institution | OA Journals |
| issn | 2470-1343 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-f98bbbd6567e47eeaccd1ac96d27d73d2025-08-20T01:51:27ZengAmerican Chemical SocietyACS Omega2470-13432025-04-011018185711858210.1021/acsomega.4c11244Numerical Study of Tungsten Growth in a Chemical Vapor Deposition ReactorYafeng Wang0Lipei Peng1Yongdi Zhao2Jianpeng Wu3Haisheng Fang4Hao Chen5Tuo Wang6School of Chemical Engineering and Technology, Key Laboratory for Green Chemical Technology of Ministry of Education, Tianjin University, Tianjin, ChinaPeric Special Gases Co., Ltd, HanDan, Hebei, ChinaSchool of Materials Science and Engineering, University of Science and Technology Beijing, Beijing, ChinaSchool of Chemical Engineering and Technology, Key Laboratory for Green Chemical Technology of Ministry of Education, Tianjin University, Tianjin, ChinaSchool of Energy and Power Engineering, Huazhong University of Science and Technology, Wuhan, Hubei, ChinaSchool of Energy and Power Engineering, Huazhong University of Science and Technology, Wuhan, Hubei, ChinaSchool of Chemical Engineering and Technology, Key Laboratory for Green Chemical Technology of Ministry of Education, Tianjin University, Tianjin, Chinahttps://doi.org/10.1021/acsomega.4c11244 |
| spellingShingle | Yafeng Wang Lipei Peng Yongdi Zhao Jianpeng Wu Haisheng Fang Hao Chen Tuo Wang Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor ACS Omega |
| title | Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor |
| title_full | Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor |
| title_fullStr | Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor |
| title_full_unstemmed | Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor |
| title_short | Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor |
| title_sort | numerical study of tungsten growth in a chemical vapor deposition reactor |
| url | https://doi.org/10.1021/acsomega.4c11244 |
| work_keys_str_mv | AT yafengwang numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT lipeipeng numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT yongdizhao numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT jianpengwu numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT haishengfang numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT haochen numericalstudyoftungstengrowthinachemicalvapordepositionreactor AT tuowang numericalstudyoftungstengrowthinachemicalvapordepositionreactor |