Numerical Study of Tungsten Growth in a Chemical Vapor Deposition Reactor

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Bibliographic Details
Main Authors:	Yafeng Wang, Lipei Peng, Yongdi Zhao, Jianpeng Wu, Haisheng Fang, Hao Chen, Tuo Wang
Format:	Article
Language:	English
Published:	American Chemical Society 2025-04-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.4c11244
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