Dynamic 3D profiling of microscale surface using a MEMS mirror laser differential confocal microscope
Abstract Several advanced techniques have been used for 3D micro-surface profiling, such as white light interferometry, confocal microscopy, and atomic force microscopy. However, a major technological limitation shared among these methods is the difficulty of imaging dynamic samples in real-time at...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
|
| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-94711-w |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|