0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming
Abstract The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the frequency mismatch of MSRG can fundamentally be reduced b...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-05-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00872-z |
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