0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming

0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming

Abstract The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the frequency mismatch of MSRG can fundamentally be reduced b...

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Bibliographic Details
Main Authors: Sheng Yu, Xianfeng Huang, Jiangkun Sun, Peng Xie, Kun Lu, Yongmeng Zhang, Xuezhong Wu, Dingbang Xiao
Format: Article
Language:English
Published: Nature Publishing Group 2025-05-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-00872-z
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https://doi.org/10.1038/s41378-025-00872-z

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