Development of the RF Ion Sources for Focused Ion Beam Accelerators

The paper presents the results of investigations of ion sources developed in the IAP of NAS of Ukraine for generation of high brightness ion beams with small energy spread. A series of RF ion sources operated at the frequency of 27.12 MHz were studied: the inductive RF ion source, the helicon ion so...

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Bibliographic Details
Main Authors: V. Voznyi, V. Miroshnichenko, S. Mordyk, D. Shulha, V. Storizhko, V. Tokman
Format: Article
Language:English
Published: Sumy State University 2014-01-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua/download/numbers/2013/4/articles/jnep_2013_V5_04060.pdf
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