Effect of Annealing on Structural, Optical and Electrical Behaviours of WO3 Thin Films Prepaired by Physical Vapour Deposition Method
The effect of annealing on structural, optical and electrical properties of tungsten oxide (WO3) thin films has been investigated. WO3 films has been deposited on unheated corning glass and silicon substrates by physical vapour deposition, followed by annealing at temperatures 3000 °C and 5000 °C fo...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2011-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_260-267.pdf |
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