Phase Tandem Low-Coherence Interferometry for Surface Vibration Measurements

The development of optical methods for surface vibration measurements is currently of great interest. We propose a modified tandem low-coherence technique that utilizes the phase information of the low-coherence signal to detect surface vibrations. The resolution of this scheme is less than 1 nm for...

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Bibliographic Details
Main Authors: Petr Volkov, Alexander Bobrov, Alexander Goryunov, Mark Kovrigin, Andrey Lukyanov, Daniil Semikov, Oleg Vyazankin
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Sensors
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Online Access:https://www.mdpi.com/1424-8220/25/3/681
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