Dynamic Analysis of Vibration Attenuation in Dual-Stage Cascade Spring-Mass System (DCSMS) for High-Precision Instrumentation
The detrimental effects of low-frequency vibrations on the measurement accuracy of commercial high-precision instrumentation demand urgent resolution, particularly for instruments requiring <1 μm positioning stability. Conventional base-mounted active damping systems exhibit limitations in suppre...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/14/4/179 |
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