Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)
Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2021-03-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%20%E2%84%96%201%20(175)%20(%D0%9E%D0%9D%D0%92)/5-11%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
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