Rate-Sensing Performance of Imperfect Capacitive Ring-Based MEMS Coriolis Vibrating Gyroscopes at Large Drive Amplitudes

Rate-Sensing Performance of Imperfect Capacitive Ring-Based MEMS Coriolis Vibrating Gyroscopes at Large Drive Amplitudes

This paper investigates the effect of electrostatic nonlinearity on the rate-sensing performance of imperfect ring-based Coriolis Vibrating Gyroscopes (CVGs) for devices having 8 and 16 evenly distributed electrodes. Mathematical models are developed for CVGs operating in (i) an open loop for a line...

Full description

Saved in:
Bibliographic Details
Main Authors: Davin Arifin, Stewart McWilliam
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Sensors
Subjects:
Coriolis vibrating gyroscope
electrostatic nonlinearities
electrostatic tuning
force balancing
Online Access:https://www.mdpi.com/1424-8220/25/7/2263
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://www.mdpi.com/1424-8220/25/7/2263

Similar Items