CPLD-Based Displacement Measurement System for Nanoscale Grating Ruler

With the continuous development of science and technology, industrial production has higher and higher requirements for precision. Many high-precision measurement technologies emerge as the times require, and nanoscale grating ruler displacement measurement technology is one of them. As a kind of pr...

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Bibliographic Details
Main Authors: Jiyuan Sun, Chunlin Tian
Format: Article
Language:English
Published: Wiley 2020-01-01
Series:Journal of Chemistry
Online Access:http://dx.doi.org/10.1155/2020/5142892
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