Investigation of Elastic Properties of Sc Doped AlN: A <i>First principles</i> and Experimental Approach
Aluminum Nitride (AlN) is a promising piezoelectric material for microelectromechanical systems owing to its attractive physical and chemical properties and CMOS compatibility. It has a moderate piezo response compared to its rival material bound to its wide application. This obstacle can be overcom...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-12-01
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| Series: | Engineering Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-4591/59/1/86 |
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