Optical properties of nitride-rich SiNx and its use in CMOS-compatible near-UV Bragg filter fabrication

Optical properties of nitride-rich SiNx and its use in CMOS-compatible near-UV Bragg filter fabrication

Nitride-rich silicon-nitride (SiNx) is being explored for its potential as a suitable optical material for use in microsystems operating in the near-UV spectral range. Although silicon-rich SiNx is widely accepted as a CMOS-compatible dielectric and micromechanical material, its optical absorption l...

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Bibliographic Details
Main Authors: Reinoud F. Wolffenbuttel, Declan Winship, Yutao Qin, Yogesh Gianchandani, David Bilby, Jaco H. Visser
Format: Article
Language:English
Published: Elsevier 2024-12-01
Series:Optical Materials: X
Subjects:
Silicon-nitride
Integrated silicon optical microsystems
Near-UV optical filter
Optical MEMS technology
CMOS compatibility
Online Access:http://www.sciencedirect.com/science/article/pii/S2590147824000603
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