Analysis of Solid and Ionic Surface Reaction Form to Surface Quality when Using Chemical-Mechanical Slurry Polishing

Analysis of Solid and Ionic Surface Reaction Form to Surface Quality when Using Chemical-Mechanical Slurry Polishing

The process of removing machining residues using chemical-mechanical slurry (CMS) has an important place in the creation of ultra-precise components in optical devices. Based on this feature, this work investigates the efficiency of the CMS polishing process by comparing the surface reaction modes b...

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Bibliographic Details
Main Authors: Le Anh Duc, Pham Minh Hieu, Nguyen Trong Mai, Thai Van Trong, Nguyen Minh Quang
Format: Article
Language:English
Published: Publishing House of Wrocław Board of Scientific Technical Societies Federation NOT 2022-05-01
Series:Journal of Machine Engineering
Subjects:
polishing
chemical-mechanical slurry
abrasive particles
ionic surface reaction
Online Access:http://jmacheng.not.pl/Analysis-of-Solid-and-Ionic-Surface-Reaction-Form-to-Surface-Quality-when-Using-Chemical,149496,0,2.html
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