Bohm Diffusion in Magnetron Sputtering System: A Review Article
This review provides a comprehensive analysis of recent advances in understanding Bohm diffusion in magnetron sputtering systems, a process critical for optimizing thin-film deposition. Bohm diffusion significantly influences the spatial distribution and energy of sputtered particles near the subst...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Corporation of Research and Industrial Development
2024-12-01
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| Series: | Iraqi Journal of Industrial Research |
| Subjects: | |
| Online Access: | http://ijoir.gov.iq/ijoir/index.php/jou/article/view/462 |
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