Fabrication of microchannels in lithium tantalate by selective etching of structures inscribed with a femtosecond laser
Selective etching of material areas modified by femtosecond laser pulses in the volume of lithium tantalate has been applied to produce hollow microchannels. In a fully monolithic approach, microchannels up to 2.5 mm long with cross sections of 2.5 µ m × 20 µ m were etched into the crystal volume at...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | JPhys Photonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2515-7647/ade1bb |
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