Electromigration failure induced by interdiffusion between Al trace and Cu seed layer in the immortal microbump in three-dimensional integrated circuit

Owing to ultrahigh current density and severe Joule heating, electromigration (EM) in the microbump is a crucial reliability issue in three-dimensional integrated circuit. In this study, we investigated a novel EM weak link in our 13 μm microbump after all of the solder transformed into intermetalli...

Full description

Saved in:
Bibliographic Details
Main Authors: Yifan Yao, Yuxuan An, K.N. Tu, Yingxia Liu
Format: Article
Language:English
Published: Elsevier 2025-05-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785425011196
Tags: Add Tag
No Tags, Be the first to tag this record!