Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2025-05-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.5c02453 |
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| _version_ | 1850121684727627776 |
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| author | Alain E. Kaloyeros Barry Arkles |
| author_facet | Alain E. Kaloyeros Barry Arkles |
| author_sort | Alain E. Kaloyeros |
| collection | DOAJ |
| format | Article |
| id | doaj-art-d6015055bce14c2b8e345a746d21eaba |
| institution | OA Journals |
| issn | 2470-1343 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-d6015055bce14c2b8e345a746d21eaba2025-08-20T02:35:01ZengAmerican Chemical SocietyACS Omega2470-13432025-05-011022235822359010.1021/acsomega.5c02453Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence ComputingAlain E. Kaloyeros0Barry Arkles1Kalark Nanostructure Sciences Inc., Doylestown, Pennsylvania, United StatesKalark Nanostructure Sciences Inc., Doylestown, Pennsylvania, United Stateshttps://doi.org/10.1021/acsomega.5c02453 |
| spellingShingle | Alain E. Kaloyeros Barry Arkles Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing ACS Omega |
| title | Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing |
| title_full | Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing |
| title_fullStr | Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing |
| title_full_unstemmed | Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing |
| title_short | Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing |
| title_sort | substrate activated conformal deposition through interfacial control by a soft energy intensification process for functional integration in high performance artificial intelligence computing |
| url | https://doi.org/10.1021/acsomega.5c02453 |
| work_keys_str_mv | AT alainekaloyeros substrateactivatedconformaldepositionthroughinterfacialcontrolbyasoftenergyintensificationprocessforfunctionalintegrationinhighperformanceartificialintelligencecomputing AT barryarkles substrateactivatedconformaldepositionthroughinterfacialcontrolbyasoftenergyintensificationprocessforfunctionalintegrationinhighperformanceartificialintelligencecomputing |