Substrate Activated Conformal Deposition Through Interfacial Control by a Soft Energy Intensification Process for Functional Integration in High Performance Artificial Intelligence Computing
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2025-05-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.5c02453 |
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