Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films
This article reports on the oxidation of 100 nm-thick vanadium layers achieved by sputtering glancing-angle deposition on silicon, with opposite oblique columns creating a zigzag-like morphology, using a small overpressure continuous flow of air and an infrared lamps furnace. In addition, the study...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-01-01
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| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523925000017 |
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