UV coatings using Ta2O5-SiO2 quantized nanolaminates
The use of Quantized Nanolaminates (QNL) in optical interference coatings has gained significant attention in recent years. By using a magnetron sputtering tool from Evatec with rotating substrate table and multiple sputtering sources operating simultaneously, we are able to deposit these metamateri...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2025-01-01
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| Series: | Journal of the European Optical Society-Rapid Publications |
| Subjects: | |
| Online Access: | https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20250009/jeos20250009.html |
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