Research progress in the relationship between packaging structures and service performance of MEMS inertial sensors

Research progress in the relationship between packaging structures and service performance of MEMS inertial sensors

In recent years, micro-electro-mechanical systems (MEMS) technology has advanced rapidly, leading to widespread adoption of MEMS inertial sensors in areas such as consumer electronics, industrial automation, national defense, and military systems. These sensors offer notable advantages, including co...

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Bibliographic Details
Main Authors: Zhaoyang Liu, Xu Yang, Yongjun Jia, Yanshun Zhang, Yang Pang, Xiaojuan Huang
Format: Article
Language:English
Published: Frontiers Media S.A. 2025-07-01
Series:Frontiers in Materials
Subjects:
packaging structure
MEMS
inertial sensors
service performance
IMU
Online Access:https://www.frontiersin.org/articles/10.3389/fmats.2025.1655566/full
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https://www.frontiersin.org/articles/10.3389/fmats.2025.1655566/full

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