Fabrication of Anti-Reflective Composite Structures on Inverted Pyramids Using Inductively Coupled Plasma Etching
The anti-reflective properties of silicon surfaces play a pivotal role in determining the light absorption efficiency of various silicon-based optoelectronic devices, with surface micro-nanostructures emerging as a crucial technological approach for achieving enhanced anti-reflection. In this study,...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/5/503 |
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