Figure of merit for piezoelectric MEMS speakers
Abstract Piezoelectric MEMS speakers, an emerging technology with great promise, face significant challenges in performance evaluation and rational design. Their broadband nature means that responses at every frequency point across the whole operating bandwidth contribute to performance, yet there i...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-07-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00991-7 |
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