Figure of merit for piezoelectric MEMS speakers

Figure of merit for piezoelectric MEMS speakers

Abstract Piezoelectric MEMS speakers, an emerging technology with great promise, face significant challenges in performance evaluation and rational design. Their broadband nature means that responses at every frequency point across the whole operating bandwidth contribute to performance, yet there i...

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Main Authors: Mingchao Sun, Menglun Zhang, Yale Wang, Shaobo Gong, Chen Sun, Chongling Sun, Chengze Liu, Linbing Xu, Wei Pang
Format: Article
Language:English
Published: Nature Publishing Group 2025-07-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-00991-7
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https://doi.org/10.1038/s41378-025-00991-7

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