Transparent PZT Capacitors on Glass for Actuating Applications

Transparent PZT Capacitors on Glass for Actuating Applications

Fully integrated transparent ITO/PZT/ITO capacitors on glass were obtained thanks to a recently developed wafer-to-wafer layer-transfer process to bypass the thermal budget issue associated with the high crystallization temperature of PZT (~700 °C). The fabricated devices show an average transparenc...

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Bibliographic Details
Main Authors: Franklin Pavageau, Christel Dieppedale, Kevin Benedetto, Christophe Licitra, Laurent Frey, Fabrice Casset, Gwenaël Le Rhun
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
MEMS
actuator
piezoelectric
glass
transparent
PZT
Online Access:https://www.mdpi.com/2504-3900/97/1/158
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