Transparent PZT Capacitors on Glass for Actuating Applications
Fully integrated transparent ITO/PZT/ITO capacitors on glass were obtained thanks to a recently developed wafer-to-wafer layer-transfer process to bypass the thermal budget issue associated with the high crystallization temperature of PZT (~700 °C). The fabricated devices show an average transparenc...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-04-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/158 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|