Nanoscale Strain Mapping in SIMOX 3-D Sculpted Silicon Waveguides Using Tip-Enhanced Raman Spectroscopy
Strain in silicon plays a significant role in exploring electro-optical material, boosting transistor performance, tuning birefringence of optical silicon waveguides, and so on. In this paper, we measured, for the first time, the nanoscale strain in the SIMOX 3-D sculpted silicon waveguides using ti...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7574350/ |
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