Nanoscale Strain Mapping in SIMOX 3-D Sculpted Silicon Waveguides Using Tip-Enhanced Raman Spectroscopy

Nanoscale Strain Mapping in SIMOX 3-D Sculpted Silicon Waveguides Using Tip-Enhanced Raman Spectroscopy

Strain in silicon plays a significant role in exploring electro-optical material, boosting transistor performance, tuning birefringence of optical silicon waveguides, and so on. In this paper, we measured, for the first time, the nanoscale strain in the SIMOX 3-D sculpted silicon waveguides using ti...

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Bibliographic Details
Main Authors: Huashun Wen, Yuefeng Ji, Bahram Jalali
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Photonics Journal
Subjects:
Electro-optical materials
engineered photonic nanostructures
optical and other properties
Raman spectroscopy
SIMOX 3-D sculpting
strained silicon
Online Access:https://ieeexplore.ieee.org/document/7574350/
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