Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers

Indium Arsenide is a III–V semiconductor with low electron effective mass, a small band gap, strong spin–orbit coupling, and a large g-factor. These properties and its surface Fermi level pinned in the conduction band make InAs a good candidate for developing superconducting solid-state quantum devi...

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Main Authors: Giulio Senesi, Katarzyna Skibinska, Alessandro Paghi, Gaurav Shukla, Francesco Giazotto, Fabio Beltram, Stefan Heun, Lucia Sorba
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Nanomaterials
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Online Access:https://www.mdpi.com/2079-4991/15/3/173
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_version_ 1850067967319998464
author Giulio Senesi
Katarzyna Skibinska
Alessandro Paghi
Gaurav Shukla
Francesco Giazotto
Fabio Beltram
Stefan Heun
Lucia Sorba
author_facet Giulio Senesi
Katarzyna Skibinska
Alessandro Paghi
Gaurav Shukla
Francesco Giazotto
Fabio Beltram
Stefan Heun
Lucia Sorba
author_sort Giulio Senesi
collection DOAJ
description Indium Arsenide is a III–V semiconductor with low electron effective mass, a small band gap, strong spin–orbit coupling, and a large g-factor. These properties and its surface Fermi level pinned in the conduction band make InAs a good candidate for developing superconducting solid-state quantum devices. Here, we report the epitaxial growth of very thin InAs layers with thicknesses ranging from 12.5 nm to 500 nm grown by Molecular Beam Epitaxy on In<sub>x</sub>Al<sub>1−x</sub>As metamorphic buffers. Differently than InAs substrates, these buffers have the advantage of being insulating at cryogenic temperatures, which allows for multiple device operations on the same wafer and thus making the approach scalable. The structural properties of the InAs layers were investigated by high-resolution X-ray diffraction, demonstrating the high crystal quality of the InAs layers. Furthermore, their transport properties, such as total and sheet carrier concentration, sheet resistance, and carrier mobility, were measured in the van der Pauw configuration at room temperature. A simple conduction model was employed to quantify the surface, bulk, and interface contributions to the overall carrier concentration and mobility.
format Article
id doaj-art-d15964d4c970457ca4ba4b737a3b8906
institution DOAJ
issn 2079-4991
language English
publishDate 2025-01-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj-art-d15964d4c970457ca4ba4b737a3b89062025-08-20T02:48:10ZengMDPI AGNanomaterials2079-49912025-01-0115317310.3390/nano15030173Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic BuffersGiulio Senesi0Katarzyna Skibinska1Alessandro Paghi2Gaurav Shukla3Francesco Giazotto4Fabio Beltram5Stefan Heun6Lucia Sorba7Istituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIstituto Nanoscienze-CNR and Scuola Normale Superiore, Piazza San Silvestro 12, 56127 Pisa, ItalyIndium Arsenide is a III–V semiconductor with low electron effective mass, a small band gap, strong spin–orbit coupling, and a large g-factor. These properties and its surface Fermi level pinned in the conduction band make InAs a good candidate for developing superconducting solid-state quantum devices. Here, we report the epitaxial growth of very thin InAs layers with thicknesses ranging from 12.5 nm to 500 nm grown by Molecular Beam Epitaxy on In<sub>x</sub>Al<sub>1−x</sub>As metamorphic buffers. Differently than InAs substrates, these buffers have the advantage of being insulating at cryogenic temperatures, which allows for multiple device operations on the same wafer and thus making the approach scalable. The structural properties of the InAs layers were investigated by high-resolution X-ray diffraction, demonstrating the high crystal quality of the InAs layers. Furthermore, their transport properties, such as total and sheet carrier concentration, sheet resistance, and carrier mobility, were measured in the van der Pauw configuration at room temperature. A simple conduction model was employed to quantify the surface, bulk, and interface contributions to the overall carrier concentration and mobility.https://www.mdpi.com/2079-4991/15/3/173InAsmolecular beam epitaxymetamorphic buffersstrainsemiconductorsIII–V materials
spellingShingle Giulio Senesi
Katarzyna Skibinska
Alessandro Paghi
Gaurav Shukla
Francesco Giazotto
Fabio Beltram
Stefan Heun
Lucia Sorba
Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
Nanomaterials
InAs
molecular beam epitaxy
metamorphic buffers
strain
semiconductors
III–V materials
title Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
title_full Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
title_fullStr Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
title_full_unstemmed Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
title_short Structural and Transport Properties of Thin InAs Layers Grown on In<sub>x</sub>Al<sub>1−x</sub>As Metamorphic Buffers
title_sort structural and transport properties of thin inas layers grown on in sub x sub al sub 1 x sub as metamorphic buffers
topic InAs
molecular beam epitaxy
metamorphic buffers
strain
semiconductors
III–V materials
url https://www.mdpi.com/2079-4991/15/3/173
work_keys_str_mv AT giuliosenesi structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT katarzynaskibinska structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT alessandropaghi structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT gauravshukla structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT francescogiazotto structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT fabiobeltram structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT stefanheun structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers
AT luciasorba structuralandtransportpropertiesofthininaslayersgrownoninsubxsubalsub1xsubasmetamorphicbuffers