Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture
To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/6/610 |
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