The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings
The effect of the high-voltage supply capacity in the form of different pulse duration on the formation of preferentially oriented crystallites and the stress-strain state of the vacuum-arc TiN coatings was analyzed. It is shown that the deposition of coatings in a high-voltage cascade forming expos...
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-06-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/2/articles/jnep_2015_V7_02042.pdf |
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| author | O.V. Sobol N.V. Pinchuk A.A. Andreev |
| author_facet | O.V. Sobol N.V. Pinchuk A.A. Andreev |
| author_sort | O.V. Sobol |
| collection | DOAJ |
| description | The effect of the high-voltage supply capacity in the form of different pulse duration on the formation of preferentially oriented crystallites and the stress-strain state of the vacuum-arc TiN coatings was analyzed. It is shown that the deposition of coatings in a high-voltage cascade forming exposure leads to the growth of the crystallites with axis texture [110] and the change in the stress-strain state: strengthening of a strain in a group of crystallites with the axis [110] and reduction of the strain in a group of crystallites with axis [111]. The results are explained by the increase in mobility of atoms and streamlining processes in the field of displacement cascades, formed under the influence of high-energy bombarding ions accelerated in the field of high-voltage pulse potential. A generalized graph of the texture type on the pulse potential and influence of the pulse duration, applied to the substrate, on the total deposition time are plotted. |
| format | Article |
| id | doaj-art-cc9f84bc89a5448c9191ad48438af178 |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-06-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-cc9f84bc89a5448c9191ad48438af1782025-08-20T02:02:47ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-06-017202042-102042-5The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN CoatingsO.V. Sobol0N.V. Pinchuk1A.A. Andreev2National Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., Kharkiv, UkraineNational Technical University «Kharkiv Polytechnic Institute», 21, Frunze Str., Kharkiv, UkraineNational Science Center Kharkov Institute of Physics and Technology, 1, Akademicheskaya Str., Kharkiv, UkraineThe effect of the high-voltage supply capacity in the form of different pulse duration on the formation of preferentially oriented crystallites and the stress-strain state of the vacuum-arc TiN coatings was analyzed. It is shown that the deposition of coatings in a high-voltage cascade forming exposure leads to the growth of the crystallites with axis texture [110] and the change in the stress-strain state: strengthening of a strain in a group of crystallites with the axis [110] and reduction of the strain in a group of crystallites with axis [111]. The results are explained by the increase in mobility of atoms and streamlining processes in the field of displacement cascades, formed under the influence of high-energy bombarding ions accelerated in the field of high-voltage pulse potential. A generalized graph of the texture type on the pulse potential and influence of the pulse duration, applied to the substrate, on the total deposition time are plotted.http://jnep.sumdu.edu.ua/download/numbers/2015/2/articles/jnep_2015_V7_02042.pdfTiNCoatingsPulse influencePotential of biasDurationRadiation factorTextureDeformatio |
| spellingShingle | O.V. Sobol N.V. Pinchuk A.A. Andreev The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings Журнал нано- та електронної фізики TiN Coatings Pulse influence Potential of bias Duration Radiation factor Texture Deformatio |
| title | The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings |
| title_full | The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings |
| title_fullStr | The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings |
| title_full_unstemmed | The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings |
| title_short | The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings |
| title_sort | effect of high voltage pulse potential applied to the substrate on the phase composition and structure of the vacuum arc tin coatings |
| topic | TiN Coatings Pulse influence Potential of bias Duration Radiation factor Texture Deformatio |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/2/articles/jnep_2015_V7_02042.pdf |
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