The Effect of High-voltage Pulse Potential Applied to the Substrate on the Phase Composition and Structure of the Vacuum-arc TiN Coatings
The effect of the high-voltage supply capacity in the form of different pulse duration on the formation of preferentially oriented crystallites and the stress-strain state of the vacuum-arc TiN coatings was analyzed. It is shown that the deposition of coatings in a high-voltage cascade forming expos...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-06-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/2/articles/jnep_2015_V7_02042.pdf |
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