LIFT OFF PROCESS ON FABRICATION OF CARBON MONOXIDE (CO) GAS SENSOR DEVICES
This paper discuss the design and fabrication of microdevice to be used as platform for CO (Carbon monoxide) gas sensor based on tin dioxide (SnO2). The device has been designed on silicon substrate with an active area of 3x3 mm2, and it is consist of bonding pad, heater, electrode, and tempe...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Universitas Sebelas Maret
2016-08-01
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| Series: | Alchemy |
| Subjects: | |
| Online Access: | https://jurnal.uns.ac.id/index.php?journal=alchemy&page=article&op=view&path[]=540 |
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