Scalable Fabrication of Highly Organized, Horizontally Aligned Sub‐5 nm Silicon Nanowires via Chemical Vapor Etching
Herein, the scalable fabrication of hierarchical silicon structures featuring high‐density, horizontally super‐aligned sub‐5 nm silicon nanowires (SiNWs), is reported. These unprecedented, highly organized silicon architectures with tunable sizes and densities are fabricated using straightforward mi...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-06-01
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| Series: | Small Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/smsc.202400627 |
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