Influence of annealing process on microstructure and purity of WTi10 target
To optimize the microstructure and purity of the WTi10 sputtering targets, the subsequent annealing process was treated without changing the initial hot pressing conditions. The microstructure, grain size, and purity of the samples were observed and measured by Keyence microscope, scanning electron...
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| Main Author: | |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Powder Metallurgy Technology
2021-06-01
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| Series: | Fenmo yejin jishu |
| Subjects: | |
| Online Access: | https://pmt.ustb.edu.cn/article/doi/10.19591/j.cnki.cn11-1974/tf.2021030025 |
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