Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions

Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions

Porous silicon nitride structures were fabricated for a humidity sensor. The porous silicon structures were fabricated by the metal-assisted chemical etching process, and the conformal silicon nitride thin film was deposited by the atomic layer deposition process. The optimized porous sensor with th...

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Bibliographic Details
Main Authors: Soobin Park, Inseong Hwang, Jae Chan Park, Tae Joo Park, Han-Seung Lee, Sang Yeon Lee, Hyun-Min Yang, Bongyoung Yoo
Format: Article
Language:English
Published: Elsevier 2024-12-01
Series:Sensors and Actuators Reports
Subjects:
Humidity sensor
Porous silicon nitride
Mace process
Alkaline conditions
Online Access:http://www.sciencedirect.com/science/article/pii/S2666053924000195
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