Flexural Plate Wave Piezoelectric MEMS Pressure Sensor

Flexural Plate Wave Piezoelectric MEMS Pressure Sensor

A piezoelectric MEMS pressure sensor that exploits the first antisymmetric vibration mode (A0) of Lamb waves is presented. The 6 mm × 6 mm diaphragm used to sense the applied pressure is composed of a stack of doped silicon (Si) and aluminum nitride (AlN) layers with metal interdigital transducers (...

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Bibliographic Details
Main Authors: Alessandro Nastro, Stefano Bertelli, Marco Ferrari, Libor Rufer, Skandar Basrour, Vittorio Ferrari
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
flexural plate waves
Lamb waves
MEMS
piezoelectric
PiezoMUMPs
pressure sensor
Online Access:https://www.mdpi.com/2504-3900/97/1/185
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