MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring

Building structure health monitoring is essential for modern buildings, sensors related to building structure health monitoring are often made with microelectrostatic cantilever beam (MECB), and the performance of this kind of devices is often affected by instability, which affects the measurement r...

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Bibliographic Details
Main Authors: Youping Gong, Hong Bo, Chuanping Zhou, Maofa Wang, Rougang Zhou
Format: Article
Language:English
Published: Wiley 2022-01-01
Series:Advances in Civil Engineering
Online Access:http://dx.doi.org/10.1155/2022/8355127
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