MEMS Dynamic Characteristics Analysis of Electrostatic Microbeams for Building Structure Monitoring
Building structure health monitoring is essential for modern buildings, sensors related to building structure health monitoring are often made with microelectrostatic cantilever beam (MECB), and the performance of this kind of devices is often affected by instability, which affects the measurement r...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
|
| Series: | Advances in Civil Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/8355127 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|