Technological limitations of solid-source chemical vapor deposition of van der Waals heterostructures

Technological limitations of solid-source chemical vapor deposition of van der Waals heterostructures

Abstract The large-scale synthesis of van der Waals heterostructures (vdWHSs) is required to adopt these materials in electronic devices. However, the repeatable and controllable growth of vdWHSs has proven challenging. Here, we investigate the technological aspects of solid-source chemical vapor de...

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Main Authors: Jakub Sitek, Wojciech Sitek, Ben R. Conran, Xiaochen Wang, Clifford McAleese, Anna Kaleta, Slawomir Kret, Iwona Pasternak, Mariusz Zdrojek, Wlodek Strupinski
Format: Article
Language:English
Published: Nature Portfolio 2025-08-01
Series:Scientific Reports
Subjects:
Chemical vapor deposition
2D materials
Van der Waals heterostructures
CVD technology
Tungsten disulfide
Graphene
Online Access:https://doi.org/10.1038/s41598-025-13921-4
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https://doi.org/10.1038/s41598-025-13921-4

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